{"id":3932,"date":"2026-02-02T13:43:18","date_gmt":"2026-02-02T05:43:18","guid":{"rendered":"https:\/\/ballvalves.tw\/?p=3932"},"modified":"2026-02-02T13:43:19","modified_gmt":"2026-02-02T05:43:19","slug":"precision-stainless-steel-valves-semiconductor-uhv-guide","status":"publish","type":"post","link":"https:\/\/ballvalves.tw\/ja\/precision-stainless-steel-valves-semiconductor-uhv-guide\/","title":{"rendered":"\u30a8\u30f3\u30b8\u30cb\u30a2\u30ea\u30f3\u30b0\u30fb\u30b6\u30fb\u30dc\u30a4\u30c9\uff1a\u534a\u5c0e\u4f53\u3068\u8d85\u9ad8\u771f\u7a7a\u306b\u304a\u3051\u308b\u7cbe\u5bc6\u30b9\u30c6\u30f3\u30ec\u30b9\u30d0\u30eb\u30d6\u306e\u91cd\u8981\u306a\u5f79\u5272"},"content":{"rendered":"<p 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<b data-path-to-node=\"8\" data-index-in-node=\"738\">\u7cbe\u5bc6\u30b9\u30c6\u30f3\u30ec\u30b9\u92fc\u30d0\u30eb\u30d6<\/b> \u306f\u3001\u30b0\u30ed\u30fc\u30d0\u30eb\u30fb\u30c6\u30af\u30ce\u30ed\u30b8\u30fc\u30fb\u30b5\u30d7\u30e9\u30a4\u30fb\u30c1\u30a7\u30fc\u30f3\u306e\u30d0\u30c3\u30af\u30dc\u30fc\u30f3\u3067\u3059\u3002\u6750\u6599\u306e\u9078\u629e\u304b\u3089\u8868\u9762\u306e\u4ed5\u4e0a\u3052\u307e\u3067\u3001\u30dc\u30a4\u30c9\u306e\u30d5\u30ed\u30f3\u30c6\u30a3\u30a2\u3067\u4ed5\u4e8b\u3092\u3059\u308b\u969b\u306b\u306f\u3001\u3042\u3089\u3086\u308b\u7d30\u90e8\u304c\u91cd\u8981\u306b\u306a\u308a\u307e\u3059\u3002.<\/p>\n<p data-path-to-node=\"8\"><img fetchpriority=\"high\" decoding=\"async\" class=\"alignnone size-full wp-image-3933\" src=\"https:\/\/ballvalves.tw\/wp-content\/uploads\/2026\/02\/Engineering-the-Void-The-Critical-Role-of-Precision-Stainless-Steel-Valves-in-Semiconductors-and-UHV-2.webp\" alt=\"Engineering the Void- The Critical Role of Precision Stainless Steel Valves in Semiconductors and UHV-2\" width=\"1376\" height=\"768\" srcset=\"https:\/\/ballvalves.tw\/wp-content\/uploads\/2026\/02\/Engineering-the-Void-The-Critical-Role-of-Precision-Stainless-Steel-Valves-in-Semiconductors-and-UHV-2.webp 1376w, https:\/\/ballvalves.tw\/wp-content\/uploads\/2026\/02\/Engineering-the-Void-The-Critical-Role-of-Precision-Stainless-Steel-Valves-in-Semiconductors-and-UHV-2-300x167.webp 300w, https:\/\/ballvalves.tw\/wp-content\/uploads\/2026\/02\/Engineering-the-Void-The-Critical-Role-of-Precision-Stainless-Steel-Valves-in-Semiconductors-and-UHV-2-1024x572.webp 1024w, https:\/\/ballvalves.tw\/wp-content\/uploads\/2026\/02\/Engineering-the-Void-The-Critical-Role-of-Precision-Stainless-Steel-Valves-in-Semiconductors-and-UHV-2-768x429.webp 768w, https:\/\/ballvalves.tw\/wp-content\/uploads\/2026\/02\/Engineering-the-Void-The-Critical-Role-of-Precision-Stainless-Steel-Valves-in-Semiconductors-and-UHV-2-18x10.webp 18w, https:\/\/ballvalves.tw\/wp-content\/uploads\/2026\/02\/Engineering-the-Void-The-Critical-Role-of-Precision-Stainless-Steel-Valves-in-Semiconductors-and-UHV-2-600x335.webp 600w\" sizes=\"(max-width: 1376px) 100vw, 1376px\" \/><\/p>\n<h2 data-path-to-node=\"9\">\u7d14\u5ea6\u306e\u30d5\u30ed\u30f3\u30c6\u30a3\u30a2\uff1a\u534a\u5c0e\u4f53\u306e\u7cbe\u5bc6\u30b9\u30c6\u30f3\u30ec\u30b9\u30d0\u30eb\u30d6\u3068\u306e\u65c5<\/h2>\n<p data-path-to-node=\"10\">1990\u5e74\u4ee3\u534a\u3070\u3001\u534a\u5c0e\u4f53\u7523\u696d\u304c\u6025\u52a0\u901f\u3092\u59cb\u3081\u305f\u9803\u3001\u9867\u5ba2\u304b\u3089\u521d\u3081\u3066 \u201c\u9178\u7d20\u7528\u306b\u6d17\u6d44\u3055\u308c\u3001\u30af\u30e9\u30b9100\u306e\u30af\u30ea\u30fc\u30f3\u30eb\u30fc\u30e0\u3067\u4e8c\u91cd\u5305\u88c5\u3055\u308c\u305f\u30d0\u30eb\u30d6 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\u306f\u3001\u4e00\u4e16\u4ee3\u524d\u306b\u306f\u60f3\u50cf\u3082\u3067\u304d\u306a\u304b\u3063\u305f\u3088\u3046\u306a\u516c\u5dee\u3067\u6a5f\u68b0\u52a0\u5de5\u3055\u308c\u3066\u3044\u307e\u3059\u3002\u9ad8\u5ea6\u306aCNC\u6280\u8853\u3068\u53b3\u683c\u306a\u30c6\u30b9\u30c8\u30d7\u30ed\u30c8\u30b3\u30eb\u3092\u4f7f\u7528\u3057\u3001\u771f\u7a7a\u4e2d\u3067\u4f55\u5343\u56de\u3082\u306e\u30b7\u30e3\u30c3\u30c8\u30aa\u30d5\u3092\u7e70\u308a\u8fd4\u3057\u3066\u3082\u3001\u3059\u3079\u3066\u306e\u30d0\u30eb\u30d6\u304c\u6c17\u6ce1\u306e\u306a\u3044\u30b7\u30e3\u30c3\u30c8\u30aa\u30d5\u3092\u5b9f\u73fe\u3057\u3066\u3044\u307e\u3059\u3002\u30ac\u30b9\u30b8\u30e3\u30f3\u30b0\u30eb\u3084\u914d\u6c34\u30de\u30cb\u30db\u30fc\u30eb\u30c9\u3067Yzng Trong\u306e\u30d0\u30eb\u30d6\u3092\u76ee\u306b\u3059\u308b\u3068\u304d\u3001\u305d\u308c\u306f\u7d76\u5bfe\u7684\u306a\u7d14\u5ea6\u3092\u8ffd\u6c42\u3057\u3001\u4f55\u5341\u5e74\u306b\u3082\u308f\u305f\u3063\u3066\u6d17\u7df4\u3055\u308c\u3066\u304d\u305f\u96c6\u5927\u6210\u3092\u76ee\u306b\u3059\u308b\u3053\u3068\u306b\u306a\u308a\u307e\u3059\u3002\u79c1\u305f\u3061\u306f\u3001\u5149\u306e\u901f\u3055\u3068\u540c\u3058\u304f\u3089\u3044\u901f\u304f\u52d5\u304d\u3001\u30c7\u30b8\u30bf\u30eb\u306e\u4e16\u754c\u3092\u53ef\u80fd\u306b\u3059\u308b\u7269\u7406\u7684\u306a\u30a4\u30f3\u30d5\u30e9\u3092\u63d0\u4f9b\u3059\u308b\u696d\u754c\u306e\u6280\u8853\u30d1\u30fc\u30c8\u30ca\u30fc\u3067\u3042\u308b\u3053\u3068\u3092\u8a87\u308a\u306b\u601d\u3063\u3066\u3044\u307e\u3059\u3002.<\/p>\n<h2 data-path-to-node=\"12\">\u30a8\u30f3\u30b8\u30cb\u30a2\u30ea\u30f3\u30b0\u30fb\u30d5\u30a9\u30fc\u30fb\u30b6\u30fb\u30dc\u30a4\u30c9\u8d85\u9ad8\u771f\u7a7a\uff08UHV\uff09\u306e\u79d1\u5b66<\/h2>\n<p data-path-to-node=\"13\">\u9ad8\u5727\u306e\u5de5\u696d\u30e9\u30a4\u30f3\u304b\u3089\u8d85\u9ad8\u771f\u7a7a\uff08UHV\uff09\u74b0\u5883\u306b\u79fb\u884c\u3059\u308b\u3068\u3001\u6d41\u4f53\u5236\u5fa1\u306e\u7269\u7406\u5b66\u306f\u5b8c\u5168\u306b\u5909\u308f\u308a\u307e\u3059\u3002\u771f\u7a7a\u4e2d\u3067\u306f\u3001\u6d41\u4f53\u3092\u62bc\u3057\u51fa\u3059\u300c\u5727\u529b\u300d\u306f\u5b58\u5728\u3057\u307e\u305b\u3093\u3002\u305d\u306e\u4ee3\u308f\u308a\u306b\u3001\u6c17\u4f53\u5206\u5b50\u304c\u30e9\u30f3\u30c0\u30e0\u306b\u52d5\u304d\u3001\u4e92\u3044\u306b\u885d\u7a81\u3059\u308b\u3053\u3068\u304c\u307b\u3068\u3093\u3069\u306a\u3044\u300c\u5206\u5b50\u6d41\u300d\u304c\u6271\u308f\u308c\u307e\u3059\u3002\u3053\u306e\u9818\u57df\u3067\u306f, <b data-path-to-node=\"13\" data-index-in-node=\"326\">\u7cbe\u5bc6\u30b9\u30c6\u30f3\u30ec\u30b9\u92fc\u30d0\u30eb\u30d6<\/b> \u30c7\u30c3\u30c9\u30dc\u30ea\u30e5\u30fc\u30e0\u300d\uff08\u7a7a\u6c17\u304c\u9589\u3058\u8fbc\u3081\u3089\u308c\u3001\u6642\u9593\u306e\u7d4c\u904e\u3068\u3068\u3082\u306b\u3086\u3063\u304f\u308a\u3068\u30c1\u30e3\u30f3\u30d0\u30fc\u5185\u306b\u6f0f\u308c\u308b\u5c0f\u3055\u306a\u30dd\u30b1\u30c3\u30c8\uff09\u3092\u6700\u5c0f\u9650\u306b\u6291\u3048\u308b\u3088\u3046\u306b\u8a2d\u8a08\u3055\u308c\u306a\u3051\u308c\u3070\u306a\u3089\u306a\u3044\u3002\u30d0\u30fc\u30c1\u30e3\u30eb\u30fb\u30ea\u30fc\u30af\u300d\u3068\u547c\u3070\u308c\u308b\u3053\u306e\u73fe\u8c61\u306f\u3001\u771f\u7a7a\u6280\u8853\u8005\u306e\u60a9\u307f\u306e\u7a2e\u3067\u3042\u308b\u3002\u79c1\u306e35\u5e74\u306b\u308f\u305f\u308b\u30c8\u30e9\u30d6\u30eb\u30b7\u30e5\u30fc\u30c6\u30a3\u30f3\u30b0\u306e\u7d4c\u9a13\u304b\u3089\u3001\u30b7\u30b9\u30c6\u30e0\u304c\u76ee\u6a19\u771f\u7a7a\u30ec\u30d9\u30eb\u306b\u9054\u3057\u306a\u3044\u5834\u5408\u3001\u305d\u306e\u539f\u56e0\u306f\u591a\u304f\u306e\u5834\u5408\u3001UHV\u30b5\u30fc\u30d3\u30b9\u7528\u306b\u771f\u306b\u8a2d\u8a08\u3055\u308c\u3066\u3044\u306a\u3044\u30d0\u30eb\u30d6\u3067\u3042\u308b\u3053\u3068\u304c\u591a\u3044\u3002.<\/p>\n<h3 data-path-to-node=\"14\">\u771f\u7a7a\u74b0\u5883\u306b\u304a\u3051\u308b\u30a2\u30a6\u30c8\u30ac\u30b9\u3068\u6750\u6599\u306e\u5b8c\u5168\u6027<\/h3>\n<p data-path-to-node=\"15\">\u771f\u7a7a\u5de5\u5b66\u306b\u304a\u3051\u308b\u6700\u5927\u306e\u8ab2\u984c\u306e\u4e00\u3064\u306f\u300c\u30a2\u30a6\u30c8\u30ac\u30b9\u300d\u3001\u3064\u307e\u308a\u30d0\u30eb\u30d6\u6750\u6599\u306e\u8868\u9762\u3084\u30d0\u30eb\u30af\u304b\u3089\u9589\u3058\u8fbc\u3081\u3089\u308c\u305f\u30ac\u30b9\u304c\u653e\u51fa\u3055\u308c\u308b\u3053\u3068\u3067\u3042\u308b\u3002\u6a19\u6e96 <b data-path-to-node=\"15\" data-index-in-node=\"155\">\u7cbe\u5bc6\u30b9\u30c6\u30f3\u30ec\u30b9\u92fc\u30d0\u30eb\u30d6<\/b> \u306f\u3001\u771f\u7a7a\u4e2d\u306b\u5206\u5b50\u3092\u300c\u30aa\u30d5\u30ac\u30b9\u300d\u3055\u305b\u3001\u5b9f\u9a13\u3084\u88fd\u9020\u30d7\u30ed\u30bb\u30b9\u3092\u53f0\u7121\u3057\u306b\u3059\u308b\u6f64\u6ed1\u5264\u3084\u30b7\u30fc\u30eb\u3092\u4f7f\u7528\u3059\u308b\u53ef\u80fd\u6027\u304c\u3042\u308a\u307e\u3059\u3002Yzng Trong\u793e\u3067\u306f\u3001\u70ad\u7d20\u542b\u6709\u91cf\u306e\u5c11\u306a\u3044\u30cf\u30a4\u30b0\u30ec\u30fc\u30c9\u306e316L\u30b9\u30c6\u30f3\u30ec\u30b9\u30b9\u30c1\u30fc\u30eb\u3092\u4f7f\u7528\u3057\u3001\u3059\u3079\u3066\u306e\u5185\u90e8\u30b7\u30fc\u30eb\u306b\u30a2\u30a6\u30c8\u30ac\u30b9\u767a\u751f\u7387\u304c\u6975\u3081\u3066\u4f4e\u3044\u7279\u6b8a\u306a\u30d5\u30c3\u7d20\u30a8\u30e9\u30b9\u30c8\u30de\u30fc\u307e\u305f\u306f\u91d1\u5c5e\u9593\u30b7\u30fc\u30eb\u3092\u4f7f\u7528\u3059\u308b\u3053\u3068\u3067\u3001\u3053\u306e\u554f\u984c\u3092\u8efd\u6e1b\u3057\u3066\u3044\u307e\u3059\u3002\u4e00\u3064\u306e\u30d0\u30eb\u30d6\u304c\u5185\u90e8\u7a7a\u6d1e\u304b\u3089\u5fae\u91cf\u306e\u6c34\u84b8\u6c17\u3092\u53d6\u308a\u8fbc\u3080\u3060\u3051\u3067\u3001\u771f\u7a7a\u30b7\u30b9\u30c6\u30e0\u304c\u300c\u30dd\u30f3\u30d7\u30c0\u30a6\u30f3\u300d\u306b\u4f55\u65e5\u3082\u304b\u304b\u308b\u306e\u3092\u898b\u305f\u3053\u3068\u304c\u3042\u308b\u3002\u9069\u5207\u306a <b data-path-to-node=\"15\" data-index-in-node=\"730\">\u7cbe\u5bc6\u30b9\u30c6\u30f3\u30ec\u30b9\u92fc\u30d0\u30eb\u30d6<\/b>, \u3053\u308c\u306b\u3088\u308a\u3001\u30dd\u30f3\u30d7\u30c0\u30a6\u30f3\u6642\u9593\u3092\u77ed\u7e2e\u3057\u3001\u96fb\u5b50\u9855\u5fae\u93e1\u3084\u7c92\u5b50\u52a0\u901f\u306a\u3069\u306e\u30d7\u30ed\u30bb\u30b9\u306b\u4e0d\u53ef\u6b20\u306a\u3001\u3088\u308a\u9ad8\u3044\u6975\u9650\u771f\u7a7a\u3092\u9054\u6210\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002.<\/p>\n<h3 data-path-to-node=\"16\">\u30b7\u30fc\u30ea\u30f3\u30b0\u6280\u8853 <span class=\"math-inline\" data-math=\"10^{-9}\" data-index-in-node=\"29\">$10^{-9}$<\/span> \u30c8\u30eb\u95be\u5024<\/h3>\n<p data-path-to-node=\"17\">\u306b\u5230\u9054\u3059\u308b\u3002 <span class=\"math-inline\" data-math=\"10^{-9}\" data-index-in-node=\"13\">$10^{-9}$<\/span> Torr\u306e\u7bc4\u56f2\u306f\u3001UHV\u306e\u6a19\u6e96\u3067\u3042\u308b\u3002 <b data-path-to-node=\"17\" data-index-in-node=\"79\">\u7cbe\u5bc6\u30b9\u30c6\u30f3\u30ec\u30b9\u92fc\u30d0\u30eb\u30d6<\/b> \u306f\u5b8c\u74a7\u3067\u306a\u3051\u308c\u3070\u306a\u3089\u306a\u3044\u3002PTFE\u306e\u3088\u3046\u306a\u5f93\u6765\u306e\u30bd\u30d5\u30c8\u30b7\u30fc\u30c8\u306f\u3001\u30ac\u30b9\u5206\u5b50\u3092\u5f90\u3005\u306b\u900f\u904e\u3055\u305b\u308b\u305f\u3081\u3001\u3053\u306e\u3088\u3046\u306a\u74b0\u5883\u3067\u306f\u3057\u3070\u3057\u3070\u9650\u754c\u306b\u9054\u3057\u307e\u3059\u3002\u6700\u5148\u7aef\u306e\u8d85\u9ad8\u771f\u7a7a\u7528\u9014\u3067\u306f\u3001\u91d1\u5c5e\u30b7\u30fc\u30c8\u30d0\u30eb\u30d6\u3084\u7279\u6b8a\u306a\u30d9\u30ed\u30fc\u30ba\u30b7\u30fc\u30eb\u30d0\u30eb\u30d6\u304c\u3088\u304f\u4f7f\u308f\u308c\u307e\u3059\u3002\u30d9\u30ed\u30fc\u30ba\u306e\u30c7\u30b6\u30a4\u30f3\u306f\u7279\u306b\u72ec\u5275\u7684\u3067\u3001\u30d0\u30eb\u30d6\u5185\u90e8\u6a5f\u69cb\u3068\u771f\u7a7a\u74b0\u5883\u3068\u306e\u9593\u306b\u5bc6\u9589\u3055\u308c\u305f\u5168\u91d1\u5c5e\u88fd\u306e\u30d0\u30ea\u30a2\u3092\u4f5c\u308b\u304b\u3089\u3067\u3059\u3002\u79c1\u306e\u6570\u5341\u5e74\u306b\u308f\u305f\u308b\u7d4c\u9a13\u304b\u3089\u3001\u30d9\u30ed\u30fc\u30ba\u30b7\u30fc\u30eb\u30d0\u30eb\u30d6\u306b\u306f\u6b21\u306e\u3088\u3046\u306a\u7279\u9577\u304c\u3042\u308a\u307e\u3059\u3002 <b data-path-to-node=\"17\" data-index-in-node=\"597\">\u7cbe\u5bc6\u30b9\u30c6\u30f3\u30ec\u30b9\u92fc\u30d0\u30eb\u30d6<\/b> \u306f\u3001\u9ad8\u7d14\u5ea6\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u3067100%\u306e\u5b8c\u5168\u6027\u3092\u4fdd\u8a3c\u3059\u308b\u552f\u4e00\u306e\u65b9\u6cd5\u3067\u3059\u3002\u6e2c\u5b9a\u53ef\u80fd\u306a\u5b87\u5b99\u306e\u679c\u3066\u3001\u3064\u307e\u308a1\u5206\u5b50\u304c\u91cd\u8981\u306a\u51fa\u6765\u4e8b\u3068\u306a\u308b\u3088\u3046\u306a\u5834\u6240\u3067\u4f5c\u696d\u3059\u308b\u5834\u5408\u3001\u5358\u306b\u300c\u30bf\u30a4\u30c8\u300d\u3067\u3042\u308b\u3060\u3051\u3067\u306a\u304f\u3001\u7d76\u5bfe\u7684\u306a\u30b7\u30fc\u30eb\u304c\u5fc5\u8981\u3067\u3059\u3002.<\/p>\n<h2 data-path-to-node=\"18\">\u8868\u9762\u79d1\u5b66\uff1aRa\u5024\u304c\u7cbe\u5bc6\u30b9\u30c6\u30f3\u30ec\u30b9\u30b9\u30c1\u30fc\u30eb\u30d0\u30eb\u30d6\u3092\u898f\u5b9a\u3059\u308b\u7406\u7531<\/h2>\n<p data-path-to-node=\"19\">\u3082\u3057\u79c1\u305f\u3061\u306e <b data-path-to-node=\"19\" data-index-in-node=\"26\">\u7cbe\u5bc6\u30b9\u30c6\u30f3\u30ec\u30b9\u92fc\u30d0\u30eb\u30d6<\/b> \u9855\u5fae\u93e1\u3067\u898b\u308b\u3068\u3001\u8868\u9762\u4ed5\u4e0a\u3052\u304c\u305d\u306e\u54c1\u8cea\u3092\u5982\u5b9f\u306b\u7269\u8a9e\u3063\u3066\u3044\u307e\u3059\u3002\u9ad8\u7d14\u5ea6\u7523\u696d\u3067\u306f\u3001\u30d0\u30eb\u30d6\u306e\u5185\u90e8\u7c97\u3055\uff08Ra\u5024\u3067\u6e2c\u5b9a\uff09\u306f\u91cd\u8981\u306a\u4ed5\u69d8\u3067\u3059\u3002\u6a19\u6e96\u7684\u306a\u5de5\u696d\u7528\u30d0\u30eb\u30d6\u306eRa\u306f0.8\u03bcm\u3067\u3001\u76ee\u306b\u306f\u6ed1\u3089\u304b\u306b\u898b\u3048\u307e\u3059\u304c\u3001\u5b9f\u969b\u306b\u306f\u5206\u5b50\u30ec\u30d9\u30eb\u3067\u5c71\u3042\u308a\u8c37\u3042\u308a\u3067\u3059\u3002\u3053\u308c\u3089\u306e\u8c37\u306f\u3001\u6c34\u5206\u3001\u30ac\u30b9\u3001\u5fae\u7c92\u5b50\u3092\u6355\u6349\u3057\u3001\u3086\u3063\u304f\u308a\u3068\u30d7\u30ed\u30bb\u30b9\u306e\u6d41\u308c\u306b\u653e\u51fa\u3057\u307e\u3059\u3002\u79c1\u305f\u3061\u306e <b data-path-to-node=\"19\" data-index-in-node=\"531\">\u7cbe\u5bc6\u30b9\u30c6\u30f3\u30ec\u30b9\u92fc\u30d0\u30eb\u30d6<\/b> \u534a\u5c0e\u4f53\u696d\u754c\u5411\u3051\u306e\u96fb\u89e3\u7814\u78e8\u306f\u901a\u5e38\u3001Ra\u304c0.25\u03bcm\u4ee5\u4e0a\u3067\u3042\u308b\u3002\u3053\u308c\u306b\u3088\u308a\u3001\u8868\u9762\u7a4d\u3092\u6700\u5c0f\u9650\u306b\u6291\u3048\u3001\u6c5a\u67d3\u304c\u5b9a\u7740\u3059\u308b\u306e\u3092\u9632\u3050\u300c\u93e1\u9762\u4ed5\u4e0a\u3052\u300d\u304c\u5b9f\u73fe\u3059\u308b\u3002.<\/p>\n<p data-path-to-node=\"20\">\u96fb\u89e3\u7814\u78e8\u306e\u30d7\u30ed\u30bb\u30b9\u306f\u3001\u5358\u306b\u30d0\u30eb\u30d6\u306e\u5916\u89b3\u3092\u826f\u304f\u3059\u308b\u3060\u3051\u3067\u306a\u304f\u3001\u8868\u9762\u3092\u5316\u5b66\u7684\u306b\u5909\u5316\u3055\u305b\u3001\u3088\u308a\u539a\u304f\u5b89\u5b9a\u3057\u305f\u9178\u5316\u30af\u30ed\u30e0\u5c64\u3092\u5f62\u6210\u3057\u307e\u3059\u3002\u3053\u306e\u300c\u4e0d\u52d5\u614b\u5316\u300d\u3053\u305d\u304c\u3001\u5f53\u793e\u306e <b data-path-to-node=\"20\" data-index-in-node=\"198\">\u7cbe\u5bc6\u30b9\u30c6\u30f3\u30ec\u30b9\u92fc\u30d0\u30eb\u30d6<\/b> \u30a8\u30c3\u30c1\u30f3\u30b0\u3084\u6d17\u6d44\u5de5\u7a0b\u3067\u4f7f\u7528\u3055\u308c\u308b\u653b\u6483\u7684\u306a\u30ac\u30b9\u306b\u5bfe\u3057\u3066\u975e\u5e38\u306b\u8010\u6027\u304c\u3042\u308b\u3002\u65e5\u672c\u306e\u3042\u308b\u7814\u7a76\u6240\u306e\u30d7\u30ed\u30b8\u30a7\u30af\u30c8\u3067\u306f\u3001\u30ac\u30b9\u30e9\u30a4\u30f3\u306e\u6c5a\u67d3\u304c\u7d76\u3048\u306a\u304b\u3063\u305f\u3053\u3068\u3092\u899a\u3048\u3066\u3044\u307e\u3059\u3002\u79c1\u305f\u3061\u306f\u3001\u305d\u306e\u6a19\u6e96\u30d0\u30eb\u30d6\u3092\u96fb\u89e3\u7814\u78e8\u3055\u308c\u305f\u5f53\u793e\u306e\u30d0\u30eb\u30d6\u306b\u4ea4\u63db\u3057\u307e\u3057\u305f\u3002 <b data-path-to-node=\"20\" data-index-in-node=\"479\">\u7cbe\u5bc6\u30b9\u30c6\u30f3\u30ec\u30b9\u92fc\u30d0\u30eb\u30d6<\/b>, \u305d\u3057\u3066\u3001\u30b3\u30f3\u30bf\u30df\u30cd\u30fc\u30b7\u30e7\u30f3\u30ec\u30d9\u30eb\u306f90%\u4f4e\u4e0b\u3057\u305f\u3002\u3053\u308c\u306f\u3001\u30cf\u30a4\u30c6\u30af\u6d41\u4f53\u5236\u5fa1\u306b\u304a\u3051\u308b\u6027\u80fd\u306e\u9375\u304c\u3044\u304b\u306b\u300c\u8868\u9762\u79d1\u5b66\u300d\u3067\u3042\u308b\u304b\u3092\u793a\u3059\u5b8c\u74a7\u306a\u4f8b\u3067\u3042\u308b\u3002\u7cbe\u5bc6\u3055\u306b\u3064\u3044\u3066\u8a9e\u308b\u3068\u304d\u3001\u79c1\u305f\u3061\u306f\u5358\u306b\u90e8\u54c1\u306e\u9069\u5408\u306b\u3064\u3044\u3066\u8a71\u3057\u3066\u3044\u308b\u306e\u3067\u306f\u306a\u304f\u3001\u6d41\u4f53\u304c\u89e6\u308c\u308b\u8868\u9762\u306e\u5206\u5b50\u30ec\u30d9\u30eb\u306e\u6ed1\u3089\u304b\u3055\u306b\u3064\u3044\u3066\u8a71\u3057\u3066\u3044\u308b\u306e\u3067\u3059\u3002.<\/p>\n<h2 data-path-to-node=\"21\">\u30af\u30ea\u30fc\u30f3\u30eb\u30fc\u30e0\u30d7\u30ed\u30c8\u30b3\u30eb\u3068\u30a2\u30bb\u30f3\u30d6\u30ea\u30fc\u30a8\u30af\u30bb\u30ec\u30f3\u30b9<\/h2>\n<p data-path-to-node=\"22\">\u30d0\u30eb\u30d6\u306f\u3001\u305d\u306e\u30d0\u30eb\u30d6\u304c\u4f5c\u3089\u308c\u305f\u74b0\u5883\u3068\u540c\u3058\u304f\u3089\u3044\u7d14\u7c8b\u3067\u3059\u3002Yzng Trong\u3067\u306f\u3001\u4ee5\u4e0b\u306e\u3053\u3068\u3092\u7406\u89e3\u3057\u3066\u3044\u307e\u3059\u3002 <b data-path-to-node=\"22\" data-index-in-node=\"98\">\u7cbe\u5bc6\u30b9\u30c6\u30f3\u30ec\u30b9\u92fc\u30d0\u30eb\u30d6<\/b>, \u88fd\u9020\u5de5\u7a0b\u306fCNC\u30de\u30b7\u30f3\u3067\u7d42\u308f\u308a\u307e\u305b\u3093\u3002\u6700\u7d42\u7684\u306a\u6d17\u6d44\u3068\u7d44\u307f\u7acb\u3066\u306e\u6bb5\u968e\u3067\u3001\u79c1\u305f\u3061\u306e\u88fd\u54c1\u304c\u4e16\u754c\u6709\u6570\u306e\u534a\u5c0e\u4f53\u5de5\u5834\u3067\u8981\u6c42\u3055\u308c\u308b\u300c\u30af\u30e9\u30b9100\u300d\u306e\u30af\u30ea\u30fc\u30f3\u30eb\u30fc\u30e0\u57fa\u6e96\u3092\u6e80\u305f\u3059\u3053\u3068\u3092\u4fdd\u8a3c\u3059\u308b\u306e\u3067\u3059\u3002\u79c1\u306f\u3053\u306e\u696d\u754c\u306735\u5e74\u9593\u3001\u4eba\u3068\u306e\u63a5\u89e6\u304c\u6700\u5927\u306e\u6c5a\u67d3\u6e90\u3067\u3042\u308b\u3053\u3068\u3092\u5b66\u3073\u307e\u3057\u305f\u3002\u3060\u304b\u3089\u3053\u305d\u3001\u5f53\u793e\u306e\u9ad8\u7d14\u5ea6 <b data-path-to-node=\"22\" data-index-in-node=\"489\">\u7cbe\u5bc6\u30b9\u30c6\u30f3\u30ec\u30b9\u92fc\u30d0\u30eb\u30d6<\/b> \u306f\u3001\u5168\u8eab\u300c\u30d0\u30cb\u30fc\u30b9\u30fc\u30c4\u300d\u306b\u8eab\u3092\u5305\u3093\u3060\u6280\u8853\u8005\u306e\u307f\u304c\u3001\u7c92\u5b50\u3092\u6392\u51fa\u3057\u306a\u3044\u7279\u6b8a\u306a\u5de5\u5177\u3092\u4f7f\u7528\u3057\u3066\u53d6\u308a\u6271\u3044\u307e\u3059\u3002\u3059\u3079\u3066\u306e\u30d0\u30eb\u30d6\u306f\u8d85\u97f3\u6ce2\u6d17\u6d44\u5668\u3068\u8131\u30a4\u30aa\u30f3\u6c34\u3067\u6d17\u6d44\u3055\u308c\u305f\u5f8c\u3001\u9ad8\u8f1d\u5ea6UV\u30e9\u30a4\u30c8\u3067\u691c\u67fb\u3055\u308c\u3001\u6709\u6a5f\u6b8b\u7559\u7269\u3084\u57c3\u306e\u75d5\u8de1\u304c\u306a\u3044\u304b\u30c1\u30a7\u30c3\u30af\u3055\u308c\u307e\u3059\u3002.<\/p>\n<h3 data-path-to-node=\"23\">\u30aa\u30a4\u30eb\u30d5\u30ea\u30fc\u6d17\u6d44\u3068\u8131\u8102\u306e\u91cd\u8981\u6027<\/h3>\n<p data-path-to-node=\"24\">\u307b\u3068\u3093\u3069\u306e\u7523\u696d\u7528\u9014\u3067\u306f\u3001\u5c11\u3005\u306e\u52a0\u5de5\u6cb9\u306e\u6b8b\u7559\u306f\u7121\u5bb3\u3067\u3059\u3002\u3057\u304b\u3057\u3001\u9ad8\u7d14\u5ea6\u30ac\u30b9\u30b7\u30b9\u30c6\u30e0\u3067\u306f\u3001\u4e00\u6ef4\u306e\u30aa\u30a4\u30eb\u304c\u30d7\u30ed\u30bb\u30b9\u30ac\u30b9\u3068\u53cd\u5fdc\u3057\u305f\u308a\u3001\u30a6\u30a7\u30cf\u30fc\u306e\u8868\u9762\u3092\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u3057\u305f\u308a\u3057\u3066\u3001\u751f\u7523\u304c\u5b8c\u5168\u306b\u5931\u308f\u308c\u308b\u53ef\u80fd\u6027\u304c\u3042\u308a\u307e\u3059\u3002\u5f53\u793e\u306e\u5834\u5408 <b data-path-to-node=\"24\" data-index-in-node=\"247\">\u7cbe\u5bc6\u30b9\u30c6\u30f3\u30ec\u30b9\u92fc\u30d0\u30eb\u30d6<\/b>, \u79c1\u305f\u3061\u306f\u3001\u6eb6\u5264\u8131\u8102\u3068\u6e29\u7d14\u6c34\u6d17\u6d44\u3092\u4f55\u6bb5\u968e\u306b\u3082\u5206\u3051\u3066\u884c\u3046\u300c\u30aa\u30a4\u30eb\u30d5\u30ea\u30fc\u300d\u6d17\u6d44\u30d7\u30ed\u30c8\u30b3\u30eb\u3092\u63a1\u7528\u3057\u3066\u3044\u307e\u3059\u3002\u9ad8\u7d14\u5ea6\u30e9\u30a4\u30f3\u306b \u201c\u6a19\u6e96\u7684\u306a \u201d\u30d0\u30eb\u30d6\u304c\u8a2d\u7f6e\u3055\u308c\u3001\u70ad\u5316\u6c34\u7d20\u6c5a\u67d3\u3067\u30b7\u30b9\u30c6\u30e0\u5168\u4f53\u304c\u30c0\u30a6\u30f3\u3057\u3066\u3044\u308b\u73fe\u5834\u3092\u898b\u305f\u3053\u3068\u304c\u3042\u308a\u307e\u3059\u3002Yzng Trong\u306e\u8a8d\u5b9a\u30aa\u30a4\u30eb\u30d5\u30ea\u30fc\u30fb\u30d0\u30eb\u30d6\u3092\u9078\u3076\u3053\u3068\u3067\u3001\u79c1\u306f\u3053\u306e\u3088\u3046\u306a\u554f\u984c\u3092\u89e3\u6c7a\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002 <b data-path-to-node=\"24\" data-index-in-node=\"602\">\u7cbe\u5bc6\u30b9\u30c6\u30f3\u30ec\u30b9\u92fc\u30d0\u30eb\u30d6<\/b>, \u534a\u5c0e\u4f53\u88fd\u9020\u306b\u304a\u3051\u308b\u6700\u3082\u4e00\u822c\u7684\u3067\u9ad8\u4fa1\u306a\u6545\u969c\u30dd\u30a4\u30f3\u30c8\u306e\u4e00\u3064\u3092\u6392\u9664\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002\u79c1\u305f\u3061\u306f\u3001\u76ee\u306b\u898b\u3048\u308b\u8105\u5a01\u3068\u540c\u69d8\u306b\u300c\u76ee\u306b\u898b\u3048\u306a\u3044\u300d\u8105\u5a01\u306b\u3082\u771f\u5263\u306b\u53d6\u308a\u7d44\u307f\u3001\u304a\u5ba2\u69d8\u306e\u30ac\u30b9\u4f9b\u7d66\u30b7\u30b9\u30c6\u30e0\u304c\u3001\u88fd\u9020\u3057\u3066\u3044\u308b\u30c1\u30c3\u30d7\u3068\u540c\u69d8\u306b\u30af\u30ea\u30fc\u30f3\u306a\u72b6\u614b\u3092\u7dad\u6301\u3059\u308b\u3053\u3068\u3092\u4fdd\u8a3c\u3057\u307e\u3059\u3002.<\/p>\n<h3 data-path-to-node=\"25\">\u9ad8\u7d14\u5ea6\u30ac\u30b9\u30e9\u30a4\u30f3\u306b\u304a\u3051\u308b\u7c92\u5b50\u72b6\u7269\u8cea\u6c5a\u67d3\u306e\u9632\u6b62<\/h3>\n<p data-path-to-node=\"26\">\u30de\u30a4\u30af\u30ed\u30c1\u30c3\u30d7\u306e\u6a5f\u80fd\u304c\u308f\u305a\u304b\u6570\u30ca\u30ce\u30e1\u30fc\u30c8\u30eb\u306b\u7e2e\u5c0f\u3059\u308b\u306b\u3064\u308c\u3001\u300c\u6bba\u4eba\u7c92\u5b50\u300d\u306e\u30b5\u30a4\u30ba\u3082\u7e2e\u5c0f\u3057\u3066\u3044\u308b\u3002\u76ee\u306b\u898b\u3048\u306a\u3044\u5875\u306e\u4e00\u7c92\u304c\u3001\u6700\u65b0\u306e\u30c1\u30c3\u30d7\u306e2\u3064\u306e\u56de\u8def\u3092\u6a4b\u6e21\u3057\u3057\u3001\u77ed\u7d61\u3092\u5f15\u304d\u8d77\u3053\u3059\u53ef\u80fd\u6027\u304c\u3042\u308b\u3002\u3053\u308c\u304c\u3001\u79c1\u305f\u3061\u306e <b data-path-to-node=\"26\" data-index-in-node=\"224\">\u7cbe\u5bc6\u30b9\u30c6\u30f3\u30ec\u30b9\u92fc\u30d0\u30eb\u30d6<\/b> \u306f \u201c\u8131\u3052\u306a\u3044 \u201d\u3088\u3046\u306b\u30c7\u30b6\u30a4\u30f3\u3055\u308c\u3066\u3044\u308b\u3002\u79c1\u305f\u3061\u306f\u3001\u6642\u9593\u306e\u7d4c\u904e\u3068\u3068\u3082\u306b\u5265\u304c\u308c\u305f\u308a\u6469\u8017\u3057\u305f\u308a\u3059\u308b\u53ef\u80fd\u6027\u306e\u3042\u308b\u7d20\u6750\u306e\u4f7f\u7528\u3092\u907f\u3051\u3066\u3044\u308b\u3002\u3055\u3089\u306b <b data-path-to-node=\"26\" data-index-in-node=\"404\">\u7cbe\u5bc6\u30b9\u30c6\u30f3\u30ec\u30b9\u92fc\u30d0\u30eb\u30d6<\/b> \u306f\u300c\u81ea\u5df1\u6d17\u6d44\u300d\u3059\u308b\u3088\u3046\u306b\u8a2d\u8a08\u3055\u308c\u3066\u3044\u308b\u3002 <i data-path-to-node=\"26\" data-index-in-node=\"504\">\u3059\u308b<\/i> \u30b7\u30b9\u30c6\u30e0\u306b\u6d41\u5165\u3057\u305f\u6db2\u4f53\u306f\u3001\u30c7\u30c3\u30c9\u30be\u30fc\u30f3\u306b\u9589\u3058\u8fbc\u3081\u3089\u308c\u308b\u3053\u3068\u306a\u304f\u3001\u901f\u3084\u304b\u306b\u6d41\u4f53\u306b\u3088\u3063\u3066\u6d41\u3055\u308c\u308b\u3002\u79c1\u306e\u7d4c\u9a13\u304b\u3089\u3001\u3088\u304f\u8a2d\u8a08\u3055\u308c\u305f\u30ac\u30b9\u30b7\u30b9\u30c6\u30e0\u306f\u52d5\u7684\u306a\u74b0\u5883\u3067\u3042\u308a\u3001\u30d0\u30eb\u30d6\u306f\u305d\u306e\u5747\u8861\u3092\u4fdd\u3064\u3088\u3046\u306b\u8a2d\u8a08\u3055\u308c\u306a\u3051\u308c\u3070\u306a\u3089\u306a\u3044\u3053\u3068\u304c\u308f\u304b\u308a\u307e\u3057\u305f\u3002\u8a2d\u8a08\u6bb5\u968e\u304b\u3089\u6700\u7d42\u7684\u306a\u30d1\u30c3\u30b1\u30fc\u30b8\u30f3\u30b0\u306b\u81f3\u308b\u307e\u3067\u5fae\u7c92\u5b50\u5236\u5fa1\u306b\u6ce8\u529b\u3059\u308b\u3053\u3068\u3067\u3001\u5f53\u793e\u306e\u30d0\u30eb\u30d6\u306f\u4e16\u754c\u3067\u6700\u3082\u7e4a\u7d30\u306a\u30d7\u30ed\u30bb\u30b9\u306b\u5bfe\u5fdc\u3067\u304d\u308b\u3088\u3046\u306b\u306a\u3063\u3066\u3044\u307e\u3059\u3002.<\/p>\n<h2 data-path-to-node=\"27\">\u6226\u7565\u7684\u9078\u629e\u30cf\u30a4\u30c6\u30af\u30e9\u30dc\u306e\u7cbe\u5bc6\u30d0\u30eb\u30d6\u4ed5\u69d8<\/h2>\n<p data-path-to-node=\"28\">\u534a\u5c0e\u4f53\u304a\u3088\u3073\u7814\u7a76\u90e8\u9580\u306e\u30d1\u30fc\u30c8\u30ca\u30fc\u306b\u5f79\u7acb\u3064\u3088\u3046\u3001\u4ee5\u4e0b\u306e\u91cd\u8981\u306a\u4ed5\u69d8\u3092\u6bd4\u8f03\u8868\u306b\u307e\u3068\u3081\u307e\u3057\u305f\u3002 <b data-path-to-node=\"28\" data-index-in-node=\"145\">\u7cbe\u5bc6\u30b9\u30c6\u30f3\u30ec\u30b9\u92fc\u30d0\u30eb\u30d6<\/b>. .UHV\u30b7\u30b9\u30c6\u30e0\u3084\u30ac\u30b9\u4f9b\u7d66\u30de\u30cb\u30db\u30fc\u30eb\u30c9\u3092\u8a2d\u8a08\u3059\u308b\u969b\u306b\u306f\u3001\u57fa\u672c\u7684\u306a\u5727\u529b\u3068\u6e29\u5ea6\u306e\u5b9a\u683c\u4ee5\u4e0a\u306e\u3082\u306e\u3092\u691c\u8a0e\u3059\u308b\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u3002\u30d8\u30ea\u30a6\u30e0\u30ea\u30fc\u30af\u7387\u3001\u30a2\u30a6\u30c8\u30ac\u30b9\u30d7\u30ed\u30d5\u30a1\u30a4\u30eb\u3001\u8868\u9762\u4ed5\u4e0a\u3052\u3092\u8003\u616e\u3059\u308b\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u3002\u3053\u306e\u8868\u306f\u3001\u30a4\u30fc\u30b8\u30f3\u30fb\u30c8\u30ed\u30f3\u3067\u7dad\u6301\u3057\u3066\u3044\u308b\u57fa\u6e96\u3092\u53cd\u6620\u3057\u305f\u3082\u306e\u3067\u3001\u6b21\u4e16\u4ee3\u306e\u30cf\u30a4\u30c6\u30af\u30fb\u30a4\u30f3\u30d5\u30e9\u3092\u69cb\u7bc9\u3059\u308b\u30a8\u30f3\u30b8\u30cb\u30a2\u306b\u30ed\u30fc\u30c9\u30de\u30c3\u30d7\u3092\u63d0\u4f9b\u3059\u308b\u3082\u306e\u3067\u3059\u3002\u79c1\u306f\u3044\u3064\u3082\u30af\u30e9\u30a4\u30a2\u30f3\u30c8\u306b\u3053\u3046\u8a00\u3044\u805e\u304b\u305b\u308b\uff1a\u300c\u7cbe\u5ea6\u306e\u4e16\u754c\u3067\u306f\u3001\u7d30\u90e8\u306b\u307e\u3067\u3053\u3060\u308f\u308b\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u3002 <i data-path-to-node=\"28\" data-index-in-node=\"629\">\u30c0\u30e1\u30c0\u30e1<\/i> \u3042\u306a\u305f\u306e\u30d7\u30ed\u30b8\u30a7\u30af\u30c8\u3092\u6551\u3046\u3082\u306e\u3067\u3059\u300d\u3002\u201d<\/p>\n<table data-path-to-node=\"29\">\n<thead>\n<tr>\n<td><strong>\u30d0\u30eb\u30d6\u30ab\u30c6\u30b4\u30ea\u30fc<\/strong><\/td>\n<td><strong>\u7d20\u6750<\/strong><\/td>\n<td><strong>\u8868\u9762\u4ed5\u4e0a\u3052 (Ra)<\/strong><\/td>\n<td><strong>\u30d8\u30ea\u30a6\u30e0\u6f0f\u308c\u7387<\/strong><\/td>\n<td><strong>\u4e3b\u306a\u7528\u9014<\/strong><\/td>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td><span data-path-to-node=\"29,1,0,0\"><b data-path-to-node=\"29,1,0,0\" data-index-in-node=\"0\">\u9ad8\u7d14\u5ea6\u30dc\u30fc\u30eb<\/b><\/span><\/td>\n<td><span data-path-to-node=\"29,1,1,0\">ss316l (vim\/var)<\/span><\/td>\n<td><span data-path-to-node=\"29,1,2,0\">&lt; 0.25 \u03bcm\u672a\u6e80\uff08EP\uff09<\/span><\/td>\n<td><span data-path-to-node=\"29,1,3,0\">&lt; <span class=\"math-inline\" data-math=\"10^{-9}\" data-index-in-node=\"2\">$10^{-9}$<\/span> mbar-l\/s<\/span><\/td>\n<td><span data-path-to-node=\"29,1,4,0\">\u30d0\u30eb\u30af\u30ac\u30b9\u4f9b\u7d66\u3001\u30b1\u30df\u30ab\u30eb\u30d5\u30a3\u30fc\u30c9<\/span><\/td>\n<\/tr>\n<tr>\n<td><span data-path-to-node=\"29,2,0,0\"><b data-path-to-node=\"29,2,0,0\" data-index-in-node=\"0\">\u30d9\u30ed\u30fc\u30ba\u30b7\u30fc\u30eb<\/b><\/span><\/td>\n<td><span data-path-to-node=\"29,2,1,0\">SS316L<\/span><\/td>\n<td><span data-path-to-node=\"29,2,2,0\">&lt; 0.15 \u03bcm\u672a\u6e80\uff08EP\uff09<\/span><\/td>\n<td><span data-path-to-node=\"29,2,3,0\">&lt; <span class=\"math-inline\" data-math=\"10^{-10}\" data-index-in-node=\"2\">$10^{-10}$<\/span> mbar-l\/s<\/span><\/td>\n<td><span data-path-to-node=\"29,2,4,0\">\u8d85\u9ad8\u7d14\u5ea6\u30ac\u30b9\u3001\u6bd2\u6027\u30ac\u30b9\u306e\u5b89\u5168\u6027<\/span><\/td>\n<\/tr>\n<tr>\n<td><span data-path-to-node=\"29,3,0,0\"><b data-path-to-node=\"29,3,0,0\" data-index-in-node=\"0\">UHV\u771f\u7a7a\u30d0\u30eb\u30d6<\/b><\/span><\/td>\n<td><span data-path-to-node=\"29,3,1,0\">SS304 \/ SS316<\/span><\/td>\n<td><span data-path-to-node=\"29,3,2,0\">&lt; 0.4 \u03bcm<\/span><\/td>\n<td><span data-path-to-node=\"29,3,3,0\">&lt; <span class=\"math-inline\" data-math=\"10^{-11}\" data-index-in-node=\"2\">$10^{-11}$<\/span> mbar-l\/s<\/span><\/td>\n<td><span data-path-to-node=\"29,3,4,0\">\u534a\u5c0e\u4f53\u30c1\u30e3\u30f3\u30d0\u30fc\u3001\u7814\u7a76\u958b\u767a\u30e9\u30dc<\/span><\/td>\n<\/tr>\n<tr>\n<td><span data-path-to-node=\"29,4,0,0\"><b data-path-to-node=\"29,4,0,0\" data-index-in-node=\"0\">\u30c0\u30a4\u30e4\u30d5\u30e9\u30e0\u30d0\u30eb\u30d6<\/b><\/span><\/td>\n<td><span data-path-to-node=\"29,4,1,0\">SS316L<\/span><\/td>\n<td><span data-path-to-node=\"29,4,2,0\">&lt; 0.2 \u03bcm (EP)<\/span><\/td>\n<td><span data-path-to-node=\"29,4,3,0\">&lt; <span class=\"math-inline\" data-math=\"10^{-9}\" data-index-in-node=\"2\">$10^{-9}$<\/span> mbar-l\/s<\/span><\/td>\n<td><span data-path-to-node=\"29,4,4,0\">ALD\/CVD\u30d7\u30ed\u30bb\u30b9\u5236\u5fa1<\/span><\/td>\n<\/tr>\n<tr>\n<td><span data-path-to-node=\"29,5,0,0\"><b data-path-to-node=\"29,5,0,0\" data-index-in-node=\"0\">\u30b5\u30cb\u30bf\u30ea\u30fc\u30fb\u30d7\u30ec\u30b7\u30b8\u30e7\u30f3<\/b><\/span><\/td>\n<td><span data-path-to-node=\"29,5,1,0\">SS316L<\/span><\/td>\n<td><span data-path-to-node=\"29,5,2,0\">&lt; 0.5 \u03bcm\uff08\u30df\u30e9\u30fc\uff09<\/span><\/td>\n<td><span data-path-to-node=\"29,5,3,0\">&lt; <span class=\"math-inline\" data-math=\"10^{-7}\" data-index-in-node=\"2\">$10^{-7}$<\/span> mbar-l\/s<\/span><\/td>\n<td><span data-path-to-node=\"29,5,4,0\">\u88fd\u85ac\u30fb\u30d0\u30a4\u30aa\u30c6\u30af\u30ce\u30ed\u30b8\u30fc\u7814\u7a76\u6240<\/span><\/td>\n<\/tr>\n<tr>\n<td><span data-path-to-node=\"29,6,0,0\"><b data-path-to-node=\"29,6,0,0\" data-index-in-node=\"0\">\u30c1\u30a7\u30c3\u30af\u30d0\u30eb\u30d6\uff08HP\uff09<\/b><\/span><\/td>\n<td><span data-path-to-node=\"29,6,1,0\">SS316L<\/span><\/td>\n<td><span data-path-to-node=\"29,6,2,0\">&lt; 0.4 \u03bcm<\/span><\/td>\n<td><span data-path-to-node=\"29,6,3,0\">&lt; <span class=\"math-inline\" data-math=\"10^{-8}\" data-index-in-node=\"2\">$10^{-8}$<\/span> mbar-l\/s<\/span><\/td>\n<td><span data-path-to-node=\"29,6,4,0\">\u30af\u30ea\u30fc\u30f3\u30fb\u30e9\u30a4\u30f3\u306e\u9006\u6d41\u9632\u6b62<\/span><\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p data-path-to-node=\"30\">\u3053\u306e\u8868\u304b\u3089\u9078\u629e\u3059\u308b\u5834\u5408\u3001\u30d0\u30eb\u30d6\u3092 \u201c\u30ac\u30b9\u7d14\u5ea6\u30b0\u30ec\u30fc\u30c9\u201d \u306b\u5408\u308f\u305b\u308b\u3053\u3068\u304c\u91cd\u8981\u3067\u3059\u3002\u4f8b\u3048\u3070\u3001\u300c6N\u300d\uff0899.9999%\uff09\u7d14\u5ea6\u306e\u7a92\u7d20\u3092\u79fb\u9001\u3059\u308b\u5834\u5408\u306f\u3001\u512a\u308c\u305f\u8868\u9762\u4ed5\u4e0a\u3052\u3092\u6301\u3064\u30d9\u30ed\u30fc\u30ba\u30b7\u30fc\u30eb\u307e\u305f\u306f\u9ad8\u7d14\u5ea6\u30dc\u30fc\u30eb\u30d0\u30eb\u30d6\u3092\u4f7f\u7528\u3059\u308b\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u3002\u6a19\u6e96\u7684\u306a\u5de5\u696d\u7528\u30d0\u30eb\u30d6\u3092\u4f7f\u7528\u3059\u308b\u3068\u3001\u30ac\u30b9\u304c\u30d0\u30eb\u30d6\u3092\u901a\u904e\u3059\u308b\u969b\u306b\u5373\u5ea7\u306b\u30ac\u30b9\u306e\u7d14\u5ea6\u304c\u300c\u30c0\u30a6\u30f3\u30b0\u30ec\u30fc\u30c9\u300d\u3057\u3066\u3057\u307e\u3044\u307e\u3059\u3002Yzng Trong\u3067\u306f\u3001\u5165\u624b\u53ef\u80fd\u306a\u6700\u9ad8\u7d14\u5ea6\u306e\u5408\u91d1\u3067\u3042\u308bVIM\/VAR\uff08\u771f\u7a7a\u8a98\u5c0e\u6eb6\u89e3\/\u771f\u7a7a\u30a2\u30fc\u30af\u518d\u6eb6\u89e3\uff09\u92fc\u3092\u542b\u3080\u6750\u6599\u306b\u3064\u3044\u3066\u3001\u5b8c\u5168\u306a\u30c8\u30ec\u30fc\u30b5\u30d3\u30ea\u30c6\u30a3\u3092\u63d0\u4f9b\u3057\u3066\u3044\u307e\u3059\u3002\u3053\u308c\u3089\u306e\u6750\u6599\u306f\u3001\u4e8b\u5b9f\u4e0a\u3001\u4ecb\u5728\u7269\u3084\u4e0d\u7d14\u7269\u304c\u306a\u304f\u3001\u304a\u5ba2\u69d8\u306e\u88fd\u54c1\u3092\u4fdd\u8a3c\u3057\u307e\u3059\u3002 <b data-path-to-node=\"30\" data-index-in-node=\"612\">\u7cbe\u5bc6\u30b9\u30c6\u30f3\u30ec\u30b9\u92fc\u30d0\u30eb\u30d6<\/b> \u306f\u3001\u6700\u3082\u53cd\u5fdc\u6027\u306e\u9ad8\u3044\u5316\u5b66\u74b0\u5883\u306b\u304a\u3044\u3066\u3082\u5b89\u5b9a\u3057\u305f\u72b6\u614b\u3092\u4fdd\u3061\u307e\u3059\u3002\u3053\u306e\u59a5\u5354\u306e\u306a\u3044\u6280\u8853\u7684\u53b3\u5bc6\u3055\u306b\u3088\u308a\u3001\u5f53\u793e\u306f\u4e16\u754c\u6700\u5148\u7aef\u306e\u6280\u8853\u30af\u30e9\u30b9\u30bf\u30fc\u306b\u9078\u3070\u308c\u308b\u30b5\u30d7\u30e9\u30a4\u30e4\u30fc\u3068\u306a\u3063\u3066\u3044\u307e\u3059\u3002.<\/p>\n<h2 data-path-to-node=\"31\">\u30cf\u30fc\u30c9\u30a6\u30a7\u30a2\u3092\u8d85\u3048\u3066\uff1a\u30a4\u30fc\u30b8\u30f3\u30fb\u30c8\u30ed\u30f3\u304c\u7d04\u675f\u3059\u308b\u30c6\u30af\u30ce\u30ed\u30b8\u30fc\u306e\u672a\u6765<\/h2>\n<p data-path-to-node=\"32\">\u91cf\u5b50\u30b3\u30f3\u30d4\u30e5\u30fc\u30bf\u30fc\u3068\u9ad8\u5ea6\u306a\u30ca\u30ce\u30c6\u30af\u30ce\u30ed\u30b8\u30fc\u306e\u65b0\u6642\u4ee3\u3092\u76ee\u524d\u306b\u63a7\u3048\u305f\u4eca\u3001\u305d\u306e\u5f79\u5272\u3068\u306f\uff1f <b data-path-to-node=\"32\" data-index-in-node=\"99\">\u7cbe\u5bc6\u30b9\u30c6\u30f3\u30ec\u30b9\u92fc\u30d0\u30eb\u30d6<\/b> \u306f\u3053\u308c\u307e\u3067\u4ee5\u4e0a\u306b\u91cd\u8981\u3067\u3059\u3002\u79c1\u305f\u3061\u306f\u5358\u306a\u308b\u30cf\u30fc\u30c9\u30a6\u30a7\u30a2\u306e\u4f1a\u793e\u3067\u306f\u306a\u304f\u3001\u30a4\u30ce\u30d9\u30fc\u30b7\u30e7\u30f3\u30fb\u30b5\u30a4\u30af\u30eb\u306e\u4e0d\u53ef\u6b20\u306a\u4e00\u90e8\u306a\u306e\u3067\u3059\u3002\u30d0\u30eb\u30d6\u306e\u8868\u9762\u4ed5\u4e0a\u3052\u3092\u6539\u5584\u3057\u305f\u308a\u3001\u30d8\u30ea\u30a6\u30e0\u30ea\u30fc\u30af\u7387\u3092\u4f4e\u6e1b\u3057\u305f\u308a\u3059\u308b\u305f\u3073\u306b\u3001\u79c1\u305f\u3061\u306f\u304a\u5ba2\u69d8\u304c\u53ef\u80fd\u6027\u306e\u9650\u754c\u3092\u62bc\u3057\u5e83\u3052\u308b\u3053\u3068\u3092\u53ef\u80fd\u306b\u3057\u3066\u3044\u308b\u306e\u3067\u3059\u3002\u30a4\u30fc\u30b8\u30f3\u30fb\u30c8\u30ed\u30f3\u306f35\u5e74\u306b\u308f\u305f\u308a\u3001\u201cCommercial Integrity \u201d\u306e\u7cbe\u795e\u3092\u539f\u52d5\u529b\u3068\u3057\u3066\u304d\u307e\u3057\u305f\u3002\u30cf\u30a4\u30c6\u30af\u306e\u4e16\u754c\u3067\u306f\u3001\u3053\u308c\u306f\u30c6\u30b9\u30c8\u7d50\u679c\u306b\u3064\u3044\u3066\u6b63\u76f4\u3067\u3042\u308b\u3053\u3068\u3001\u88fd\u9020\u30d7\u30ed\u30bb\u30b9\u306b\u3064\u3044\u3066\u900f\u660e\u3067\u3042\u308b\u3053\u3068\u3001\u305d\u3057\u3066\u30d7\u30ed\u30b8\u30a7\u30af\u30c8\u304c\u6280\u8853\u7684\u306a\u58c1\u306b\u3076\u3064\u304b\u3063\u305f\u3068\u304d\u306b\u4fe1\u983c\u3067\u304d\u308b\u30d1\u30fc\u30c8\u30ca\u30fc\u3067\u3042\u308b\u3053\u3068\u3092\u610f\u5473\u3057\u307e\u3059\u3002\u79c1\u305f\u3061\u306f\u5358\u306b\u7bb1\u3092\u51fa\u8377\u3059\u308b\u3060\u3051\u3067\u306a\u304f\u3001\u8a55\u5224\u306b\u88cf\u6253\u3061\u3055\u308c\u305f\u30bd\u30ea\u30e5\u30fc\u30b7\u30e7\u30f3\u3092\u51fa\u8377\u3059\u308b\u306e\u3067\u3059\u3002.<\/p>\n<p data-path-to-node=\"33\">\u4eca\u5f8c\u3082\u3001\u3088\u308a\u30af\u30ea\u30fc\u30f3\u306a\u88fd\u9020\u6280\u8853\u3068\u3001\u3088\u308a\u9ad8\u5ea6\u306a\u8a3a\u65ad\u30c4\u30fc\u30eb\u3078\u306e\u6295\u8cc7\u3092\u7d9a\u3051\u3066\u3044\u304d\u307e\u3059\u3002 <b data-path-to-node=\"33\" data-index-in-node=\"131\">\u7cbe\u5bc6\u30b9\u30c6\u30f3\u30ec\u30b9\u92fc\u30d0\u30eb\u30d6<\/b>. .\u79c1\u305f\u3061\u306f\u3001\u516c\u5dee\u3092\u3055\u3089\u306b\u5c0f\u3055\u304f\u3059\u308b\u305f\u3081\u306bAI\u3092\u6d3b\u7528\u3057\u305f\u7cbe\u5bc6\u52a0\u5de5\u3092\u6a21\u7d22\u3057\u3001\u5fae\u7c92\u5b50\u30ec\u30d9\u30eb\u3092\u81ea\u3089\u691c\u77e5\u3067\u304d\u308b\u300c\u30b9\u30de\u30fc\u30c8\u30fb\u30d0\u30eb\u30d6\u300d\u3092\u958b\u767a\u3057\u3066\u3044\u307e\u3059\u3002\u3057\u304b\u3057\u3001\u3044\u304f\u3089\u30c7\u30b8\u30bf\u30eb\u30c4\u30fc\u30eb\u3092\u8ffd\u52a0\u3057\u3066\u3082\u3001\u79c1\u305f\u3061\u306e\u30d3\u30b8\u30cd\u30b9\u306e\u4e2d\u6838\u306f\u5e38\u306b30\u5e74\u534a\u306e\u7d4c\u9a13\u304b\u3089\u751f\u307e\u308c\u308b\u4eba\u9593\u306e\u5c02\u9580\u77e5\u8b58\u3067\u3059\u3002\u534a\u5c0e\u4f53\u3068\u8d85\u9ad8\u771f\u7a7a\u306e\u4e16\u754c\u3067\u306f\u3001\u30df\u30b9\u306f\u8a31\u3055\u308c\u306a\u3044\u3053\u3068\u3092\u79c1\u305f\u3061\u306f\u7406\u89e3\u3057\u3066\u3044\u307e\u3059\u3002\u79c1\u305f\u3061\u306f\u771f\u7a7a\u306e\u300c\u5916\u79d1\u533b\u300d\u3067\u3042\u308a\u3001\u79c1\u305f\u3061\u306e\u73fe\u4ee3\u4e16\u754c\u3092\u52d5\u304b\u3059\u6d41\u4f53\u3068\u30ac\u30b9\u304c\u3001\u7d76\u5bfe\u7684\u306b\u9ad8\u5ea6\u306a\u6ce8\u610f\u3092\u6255\u3063\u3066\u53d6\u308a\u6271\u308f\u308c\u308b\u3053\u3068\u3092\u4fdd\u8a3c\u3057\u307e\u3059\u3002\u304a\u5ba2\u69d8\u306e\u6700\u3082\u7e4a\u7d30\u3067\u91ce\u5fc3\u7684\u306a\u30d7\u30ed\u30b8\u30a7\u30af\u30c8\u306bYzng Trong\u3092\u4fe1\u983c\u3057\u3066\u3044\u305f\u3060\u304d\u3001\u3042\u308a\u304c\u3068\u3046\u3054\u3056\u3044\u307e\u3059\u3002\u4e00\u5206\u5b50\u305a\u3064\u3001\u4e00\u7dd2\u306b\u672a\u6765\u3092\u7bc9\u3044\u3066\u3044\u304d\u307e\u3057\u3087\u3046\u3002.<\/p>\n<hr data-path-to-node=\"34\" \/>\n<h3 data-path-to-node=\"35\"><b data-path-to-node=\"35\" data-index-in-node=\"0\">\u62e1\u5f35\u53c2\u8003\u30b5\u30a4\u30c8<\/b><\/h3>\n<ul>\n<li data-path-to-node=\"36,0,0\"><a class=\"ng-star-inserted\" href=\"https:\/\/www.google.com\/search?q=https:\/\/www.semi.org\/en\/standards\" target=\"_blank\" rel=\"noopener\">SEMI - \u534a\u5c0e\u4f53\u696d\u754c\u306e\u56fd\u969b\u898f\u683c<\/a><\/li>\n<li data-path-to-node=\"36,1,0\"><a class=\"ng-star-inserted\" href=\"https:\/\/avs.org\/\" target=\"_blank\" rel=\"noopener\">AVS - \u7c73\u56fd\u771f\u7a7a\u5354\u4f1a - \u30d0\u30ad\u30e5\u30fc\u30e0\u306e\u79d1\u5b66\u3068\u6280\u8853<\/a><\/li>\n<li data-path-to-node=\"36,2,0\"><a class=\"ng-star-inserted\" href=\"https:\/\/www.google.com\/search?q=https:\/\/home.cern\/science\/engineering\/vacuum\" target=\"_blank\" rel=\"noopener\">CERN - \u771f\u7a7a\u6280\u8853\u3068\u9ad8\u30a8\u30cd\u30eb\u30ae\u30fc\u7269\u7406\u5b66\u306e\u30ea\u30bd\u30fc\u30b9<\/a><\/li>\n<li data-path-to-node=\"36,3,0\"><a class=\"ng-star-inserted\" href=\"https:\/\/avs.scitation.org\/journal\/jva\" target=\"_blank\" rel=\"noopener\">\u771f\u7a7a\u79d1\u5b66\u6280\u8853\u30b8\u30e3\u30fc\u30ca\u30eb - UHV\u306e\u6700\u65b0\u7814\u7a76<\/a><\/li>\n<\/ul>","protected":false},"excerpt":{"rendered":"<p>As I reflect on 35 years in the valve industry, I\u2019ve seen our products travel through almost every conceivable environment, but none are as demanding\u2014or as fascinating\u2014as the semiconductor cleanroom and the ultra-high vacuum (UHV) laboratory. In these sectors, the concept of a &#8220;leak&#8221; is redefined. We are no longer talking about drops of water or puffs of steam; we are talking about individual molecules escaping or entering a system. This is the domain of precision stainless steel valves. At Yzng Trong International, we\u2019ve had to evolve our manufacturing philosophy to meet these microscopic tolerances. In a semiconductor fabrication plant (Fab), a single stray particle or a tiny amount of [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":3934,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"footnotes":""},"categories":[1],"tags":[],"class_list":["post-3932","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-company-updates"],"_links":{"self":[{"href":"https:\/\/ballvalves.tw\/ja\/wp-json\/wp\/v2\/posts\/3932","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/ballvalves.tw\/ja\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/ballvalves.tw\/ja\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/ballvalves.tw\/ja\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/ballvalves.tw\/ja\/wp-json\/wp\/v2\/comments?post=3932"}],"version-history":[{"count":1,"href":"https:\/\/ballvalves.tw\/ja\/wp-json\/wp\/v2\/posts\/3932\/revisions"}],"predecessor-version":[{"id":3935,"href":"https:\/\/ballvalves.tw\/ja\/wp-json\/wp\/v2\/posts\/3932\/revisions\/3935"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/ballvalves.tw\/ja\/wp-json\/wp\/v2\/media\/3934"}],"wp:attachment":[{"href":"https:\/\/ballvalves.tw\/ja\/wp-json\/wp\/v2\/media?parent=3932"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/ballvalves.tw\/ja\/wp-json\/wp\/v2\/categories?post=3932"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/ballvalves.tw\/ja\/wp-json\/wp\/v2\/tags?post=3932"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}